WAFER UV ERASE MACHINE(MASS PRODUCTION TYPE)

USED FOR 12/8 INCH EPROM/FLASH ROM WAFER ERASE PROCESS

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Features

1.DRAWER TRAY DESIGN FOR MANUAL MASS PRODUCTION
2.LOAD TRAY CAPACITY:12 INCH WAFER 6PCS/8 INCH WAFER 15PCS
3.254NM NON-CONTACT UV EXPOSURE,NO ARC DAMAGE
4.OZONEFREE LAMP DESIGN
5.ANTI UV LEAKAGE/DOOR INTERLOCK SAFETY DESIGN
6.EASY OPERATION/LAMP REPLACEMENT DESIGN

Summary

APPLIED PROCESS
1.EPROM/FLASH ROM WAFER ERASE PROCESS
2.WAFER IN-PROCESS-RESIDUAL-CHARGE NEUTRALIZATION PROCESS
3.WAFER DRY CLEAN PROCESS

Specification

ITEM	SPECIFICATION
WAFER SIZE	12/8 INCE
M / C SIZE	117 x 92 x 94 cm (W x D x H)
M / C POWER	220V 60HZ 1 PHASE
LAMP TYPE/ POWER	GRID TYPE MERCURY LAMP / 350W
PROCESS WAVELENGTH	254 NM
SAFETY DESIGN	ANTI UV LEAKAGE BOX
SAFETY DESIGN	DOOR OPEN INTERLOCK
SAFETY DESIGN	OVER TEMPERATURE AUTO SHUT DOWN